Prati
Mikhail Haurylau
Mikhail Haurylau
Sr. Research Scientist, KLA-Tencor Corp.
Potvrđena adresa e-pošte na kla-tencor.com
Naslov
Citirano
Citirano
Godina
On-chip optical interconnect roadmap: Challenges and critical directions
M Haurylau, G Chen, H Chen, J Zhang, NA Nelson, DH Albonesi, ...
IEEE Journal of Selected Topics in Quantum Electronics 12 (6), 1699-1705, 2006
5182006
Predictions of CMOS compatible on-chip optical interconnect
G Chen, H Chen, M Haurylau, N Nelson, PM Fauchet, EG Friedman, ...
Proceedings of the 2005 international workshop on System level interconnect …, 2005
2992005
Tunable photonic bandgap structures for optical interconnects
SM Weiss, M Haurylau, PM Fauchet
Optical Materials 27 (5), 740-744, 2005
872005
On-chip copper-based vs. optical interconnects: Delay uncertainty, latency, power, and bandwidth density comparative predictions
G Chen, H Chen, M Haurylau, NA Nelson, DH Albonesi, PM Fauchet, ...
2006 International Interconnect Technology Conference, 39-41, 2006
722006
Electrical modulation of silicon-based two-dimensional photonic bandgap structures
M Haurylau, SP Anderson, KL Marshall, PM Fauchet
Applied Physics Letters 88 (6), 061103, 2006
612006
Electrical and optical on-chip interconnects in scaled microprocessors
G Chen, H Chen, M Haurylau, N Nelson, D Albonesi, PM Fauchet, ...
2005 IEEE International Symposium on Circuits and Systems (ISCAS), 2514-2517, 2005
522005
Optical properties and tunability of macroporous silicon 2‐D photonic bandgap structures
M Haurylau, AR Shroff, PM Fauchet
physica status solidi (a) 202 (8), 1477-1481, 2005
242005
System and method for apodization in a semiconductor device inspection system
JM Sullivan, G Janik, S Cui, R Runyon, D Wilk, S Short, M Haurylau, ...
US Patent 9,176,069, 2015
172015
Electrically tunable silicon 2-D photonic bandgap structures
M Haurylau, SP Anderson, KL Marshall, PM Fauchet
IEEE Journal of Selected Topics in Quantum Electronics 12 (6), 1527-1533, 2006
172006
Rhenium deposition on a silicon surface at the room temperature for application in microsystems
V Petrovich, M Haurylau, S Volchek
Sensors and Actuators A: Physical 99 (1-2), 45-48, 2002
172002
System and method to determine depth for optical wafer inspection
P Kolchin, M Haurylau, R Danen
US Patent 9,389,349, 2016
142016
Nonlinear optical response of photonic bandgap structures containing PbSe quantum dots
M Haurylau, J Zhang, SM Weiss, PM Fauchet, DV Martyshkin, VI Rupasov, ...
Journal of Photochemistry and Photobiology A: Chemistry 183 (3), 329-333, 2006
132006
Hybrid photonic crystal microcavity switches on SOI
SP Anderson, M Haurylau, J Zhang, PM Fauchet
Silicon Photonics II 6477, 277-284, 2007
92007
Tunable Porous Silicon Mirrors for Optoelectronic Applications
SM Weiss, M Haurylau, PM Fauchet
MRS Online Proceedings Library (OPL) 737, 2002
72002
Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
P Kolchin, M Haurylau, J Wei, D Kapp, R Danen, G Chen
US Patent 9,709,510, 2017
62017
Electrical tuning of the silicon-based 2-D photonic bandgap structures
M Haurylau, SP Anderson, KL Marshall, PM Fauchet
Tuning the Optical Response of Photonic Bandgap Structures II 5926, 15-24, 2005
52005
Dynamically tunable 1D and 2D photonic bandgap structures for optical interconnect applications
M Haurylau, SM Weiss, PM Fauchet
Tuning the Optical Response of Photonic Bandgap Structures 5511, 38-49, 2004
52004
Determining information for defects on wafers
S Palomba, P Kolchin, M Haurylau, RM Danen, DW Shortt
US Patent 10,317,347, 2019
22019
System and method to determine depth for optical wafer inspection
P Kolchin, M Haurylau, R Danen
US Patent 9,989,479, 2018
22018
Silicon-based building blocks for VLSI on-chip optical interconnects
H Chen, M Haurylau, SM Weiss, J Ruan, J Zhang, H Ouyang, PM Fauchet
Proceedings of the IEEE 2005 International Interconnect Technology …, 2005
22005
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