| Repeater detection H Chen, K Wu, E Shifrin, M Yamaoka, G Sivaraman, R Babulnath, ... US Patent 9,766,187, 2017 | 12 | 2017 |
| Sub-pixel alignment of inspection to design S Bhattacharyya, P Kumar, L Gao, T Jayaraman, R Babulnath, ... US Patent 9,996,942, 2018 | 5 | 2018 |
| Highly effective and accurate weak point monitoring method for advanced design rule (1x nm) devices J Ahn, SJ Seong, M Yoon, IS Park, HS Kim, D Ihm, S Chin, G Sivaraman, ... Metrology, Inspection, and Process Control for Microlithography XXVIII 9050 …, 2014 | 3 | 2014 |
| Accelerating litho technology development for advanced design node flash memory FEOL by next-generation wafer inspection and SEM review platforms BH Lee, J Ahn, D Ihm, S Chin, DR Lee, S Choi, J Lee, HK Kang, ... Metrology, Inspection, and Process Control for Microlithography XXVI 8324 …, 2012 | 3 | 2012 |
| Advanced excursion control and diagnostics for CMP process monitoring A Stamper, G Sivaraman, R Sankar 2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, 1-3, 2011 | 3 | 2011 |
| Creating defect samples for array regions V Anantha, M Mariyappan, R Babulnath, G Sivaraman, S Kurada, ... US Patent 10,620,134, 2020 | 1 | 2020 |
| Methods for improving optical inspection and metrology image quality using chip design data K Sah, T Jayaraman, S Kandukuri, AJ Cross, G Sivaraman US Patent App. 17/673,370, 2022 | | 2022 |
| Leveraging puma DF wafer inspection to characterize root cause of yield loss on an advanced 32 nm HKMG SOI technology device A Blauberg, A Stamper, D Jaeger, MJ Brodsky, R Mo, T Timberlake, ... ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference, 265-267, 2013 | | 2013 |
| Optimizing inspection recipe by using virtual inspector virtual analyzer and failure bitmap R Jang, D Ihm, B Lee, PB Yong, G Simon, J Wu, G Lynch, G Sivaraman, ... ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference, 262-264, 2013 | | 2013 |
