Prati
Eric Maiken
Eric Maiken
EMC, LLC
Potvrđena adresa e-pošte na emcllc.onmicrosoft.com
Naslov
Citirano
Citirano
Godina
Dynamics of Photo-Excited Carrier Relaxation in C60 Films
T Juhasz, XH Hu, C Suarez, WE Bron, E Maiken, P Taborek
Phys. Rev. B 48, 4929, 1993
411993
Method of inferring optical parameters outside of a measurement spectral range
AR Forouhi, DA Harrison, E Maiken, J Lam
US Patent 6,710,865, 2004
242004
Implications of the varying permeability model for reverse dive profiles
DE Yount, EB Maiken, EC Baker
Smithsonian Institution Reverse Dive Profiles Workshop, 29-60, 2000
242000
Method of monitoring thin-film processes and metrology tool thereof
AR Forouhi, DA Harrison, E Maiken, JC Lam
US Patent 6,594,025, 2003
202003
Amorphous carbon films deposited from carbon ions extracted from a discharge in fullerene vapor
EB Maiken, P Taborek
Journal of Applied Physics 87 (9), 4223-4229, 2000
192000
Ion‐beam Deposition of Hard, Amorphous Carbon from a Fullerene Discharge
EB Maiken, P Taborek
Journal of Applied Physics 78, 541, 1995
171995
Complementary use of scatterometry and SEM for photoresist profile and CD determination
Y Toyoshima, I Kawata, Y Usami, Y Mitsui, A Sezginer, E Maiken, ...
Metrology, Inspection, and Process Control for Microlithography XVI 4689 …, 2002
82002
Why Argon?
E Maiken
AquaCorps Journal, 15-18, 1995
41995
Integrated Critical Dimension Metrology for Lithography Process Control
E Maiken, K Johnson, D Likhachev, A Norton, A Sezginer, F Stanke, ...
Advanced Equipment Control - Advanced Process Control Conference XIII, pp …, 2001
22001
Magnetic Microscopy of Fe/Mn/Fe Layers
H Hopster, Y Iwasaki, J Barthel, EB Maiken, BP Miller, J Kondis, Y Yu
Magnetic Ultrathin Films, Multilayers and Surfaces, 75-79, 1997
21997
Bubble Decompression
E Maiken
Deep Tech 6, 35-38, 1996
21996
Determination of lithography process control metrics by spectroscopic scatterometry
EB Maiken, G Raghavendra, C Morales, B Choo
Metrology, Inspection, and Process Control for Microlithography XVII 5038 …, 2003
12003
Magnetoresistance Effect Device, and Magnetic Memory Device
E Maiken, マイケンエリック
JP Patent JP2,008,124,479 A, 2008
2008
Scatterometry characterization of polysilicon gate profiles in a 90 nm logic process
EB Maiken
Metrology, Inspection, and Process Control for Microlithography XXI 21, 6518, 2007
2007
The Varying Permeability Model: A Decompression Razor
E Maiken
Quest 3 (1), 2002
2002
Copper CMP process monitoring using an in-line Compact Metrology System (CMS)
DV Likhachev, D Gan, E Maiken, F Stanke, KY Ramanujam, G Lee
2002
A NEW VPM ALGORITHM FOR REPETITIVE DIVES.
DE Yount, EB Maiken, EC Baker
Undersea and Hyperbaric Medical Society, 2000
2000
Nonvolatile Random Access Memory Device
マイケンエリック, E Maiken
JP Patent JP4066477B2, 1999
1999
Spin Polarization Injection Nonvolatile Random Access Memory (SPINOR RAM)
E Maiken, ンマイケエリック
JP Patent JPH11,120,758 A, 1999
1999
Ion beam deposition of amorphous carbon from a discharge in fullerenes
EB Maiken
University of California, Irvine, 1996
1996
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